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Effects of process parameters on structure and magnetic properties of sputtered Ni-Zn ferrite thin films

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3 Author(s)
Jang-Sik Lee ; Sch. of Mater. Sci. & Eng., Seoul Nat. Univ., South Korea ; Byung-Il Lee ; Joo, Seung-Ki

Ni-Zn ferrite thin films were prepared by RF magnetron sputtering at room temperature. The structure and magnetic properties of the as-deposited films were investigated as a function of oxygen partial pressure, working pressure and RF power. Deposition conditions greatly affect the crystallinity and magnetic properties of the Ni-Zn ferrite thin films. Ni-Zn ferrite thin films with spinel structure could be obtained by adjusting the process parameters without substrate heating or post heat treatment. The Ni-Zn ferrite thin film deposited with the optimized condition at room temperature showed saturation magnetization of 170 emu/cm3 and coercivity of 35 Oe

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Magnetics, IEEE Transactions on  (Volume:35 ,  Issue: 5 )