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Investigation of the effect of a “cold” electron tail on trench charging

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2 Author(s)
M. C. Converse ; Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA ; W. N. G. Hitchon

A kinetic simulation of electron and ion fluxes entering a trench has been employed to investigate the effect of the tail of the electron distribution on the self-consistent electrostatic potential distribution developed in a trench structure. The results indicate that the electron tail is probably not critical and that the low energy part of the distribution function of the ions may be the most significant component in determining the potentials developed in the trench

Published in:

IEEE Transactions on Plasma Science  (Volume:27 ,  Issue: 5 )