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Two-dimensional modeling of a micro-cell plasma in Xe driven by high frequency

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2 Author(s)
Kurihara, Masaru ; Dept. of Electr. Eng., Keio Univ., Yokohama, Japan ; Makabe, Toshiaki

Two-dimensional simulation of a micro-cell plasma driven by high frequency at 13.56 MHz is described in Xe. The minimum sustaining voltage (Vs)min in an ideal infinite parallel plates at high frequency is first discussed as a function of both pd and fd (f the applied frequency, d the electrode distance, and p the gas pressure). As decreasing d,(Vs)min increases at fixed f, while (Vs)min decreases with increasing fd at fixed pd in a high frequency discharge under the condition of a spatial ion trapping. A capability for maintaining a micro-cell plasma is investigated under fd<υ(de)/π for different two-dimensional geometry of the micro cell (υ(de) is the effective drift velocity of electrons). The influence of the secondary electron from the electrode becomes important for the maintenance of a microcell plasma and emission efficiency. A powered ring electrode and ground plate system realizes the micro-cell plasma with high density at 13.56 MHz

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Plasma Science, IEEE Transactions on  (Volume:27 ,  Issue: 5 )