By Topic

A hierarchical circuit-level design methodology for microelectromechanical systems

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
G. K. Fedder ; Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA ; Qi Jing

A circuit-level methodology for hierarchical design and nodal simulation of microelectromechanical systems (MEMS) is presented. A layout-based schematic view is introduced as a geometrically intuitive MEMS representation that is transformed into a schematic suitable for behavioral simulation. As examples of the design methodology, suspended-MEMS inertial sensors, resonant actuators, and filters are designed using a small set of geometrically parameterized plate, beam, gap, and anchor elements. Effects of manufacturing variations are evaluated by simply changing parameter values of the elements

Published in:

IEEE Transactions on Circuits and Systems II: Analog and Digital Signal Processing  (Volume:46 ,  Issue: 10 )