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A hierarchical circuit-level design methodology for microelectromechanical systems

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2 Author(s)
Fedder, G.K. ; Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA ; Qi Jing

A circuit-level methodology for hierarchical design and nodal simulation of microelectromechanical systems (MEMS) is presented. A layout-based schematic view is introduced as a geometrically intuitive MEMS representation that is transformed into a schematic suitable for behavioral simulation. As examples of the design methodology, suspended-MEMS inertial sensors, resonant actuators, and filters are designed using a small set of geometrically parameterized plate, beam, gap, and anchor elements. Effects of manufacturing variations are evaluated by simply changing parameter values of the elements

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Circuits and Systems II: Analog and Digital Signal Processing, IEEE Transactions on  (Volume:46 ,  Issue: 10 )