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Progress in CMOS integrated measurement systems

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2 Author(s)
H. Baltes ; Phys. Electron. Lab., Eidgenossische Tech. Hochschule, Zurich, Switzerland ; O. Brand

Selected micro- and nano-systems developed recently at the Physical Electronics Laboratory of ETH Zurich are reviewed: (i) a fluxgate microsystem for detection of the Earth's magnetic field; (ii) a capacitive chemical sensor microsystem for detection of volatile organic compounds in air; and (iii) a parallel scanning AFM chip. The micro- and nano-systems combine sensor structures and readout circuitry on a single chip and are fabricated using industrial CMOS technology in combination with post-processing micromachining and film deposition

Published in:

IEEE Aerospace and Electronic Systems Magazine  (Volume:14 ,  Issue: 10 )