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Simple phase-space trajectory calculation for Monte Carlo device simulation including screened impurity scattering

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3 Author(s)
Bufler, F.M. ; Inst. fur Integrierte Syst., Eidgenossische Tech. Hochschule, Zurich, Switzerland ; Yoder, P.D. ; Fichtuer, W.

A phase-space-step trajectory calculation within the scheme of self-scattering is presented. In addition, impurity scattering is approximated by the inverse microscopic relaxation time of the Ridley model. The resulting Monte Carlo algorithm is faster by a factor in the order of 15 than one, which integrates the equations of motion via a second-order Runge-Kutta technique and treats impurity scattering rigorously

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Simulation of Semiconductor Processes and Devices, 1999. SISPAD '99. 1999 International Conference on

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