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The Virtual Fab the core of future technology development

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4 Author(s)

SEMATECH's Front End (FEP) projects involve among universities, equipment/material suppliers, member companies and SEMATECH. The Virtual Fab will be at the core of research and development for SEMATECH, helping pave the way for new strategies to resolve complicated problems. The Virtual Fab integrates SEMATECH's Advanced Technology Development Fab (ATDF) with those of universities, equipment suppliers and member companies through offsite processing at those locations with the core processing at SEMATECH

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Advanced Semiconductor Manufacturing Conference and Workshop, 1999 IEEE/SEMI

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