Referenced Items are not available for this document.
The design of a semiconductor fab is a complex problem. Market competition, subsequent reduced product margins, and a heightened interest in cost of ownership (COO) have added additional dimensions. We propose a quantitative method for analyzing total system design tradeoffs. The key to this approach is designed flexibility. We propose that additional up front expenditure for flexibility allows for extended facility life and reduced total life cycle cost. A hypothetical comparison illustrates that from 1.5%-3.5% in annual savings result from an additional 10% initial investment, if the facility life can be extended five additional years
Published in:
Advanced Semiconductor Manufacturing Conference and Workshop, 1999 IEEE/SEMI
Date of Conference: 1999
- Page(s):
- 97 - 104
- Meeting Date :
- 08 Sep 1999-10 Sep 1999
- ISSN :
- 1078-8743
- Print ISBN:
- 0-7803-5217-3
- INSPEC Accession Number:
- 6505095
- Conference Location :
- Boston, MA
- Digital Object Identifier :
- 10.1109/ASMC.1999.798190
- Product Type:
- Conference Publications
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