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Advanced manufacturing equipment: a vertical batch furnace for 300-mm wafer processing

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4 Author(s)
Hasper, A. ; ASM Eur., Bilthoven, Netherlands ; Oosterlaken, E. ; Huussen, F. ; Claasen-Vujcic, T.

Production of 300-mm diameter wafers will begin in the next few years. To keep costs low and throughput high, manufacturers must design new equipment such as the furnace system presented here, rather than simply upscaling existing 200-mm equipment

Published in:

Micro, IEEE  (Volume:19 ,  Issue: 5 )

Date of Publication:

Sep/Oct 1999

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