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Reverse short-channel effect in metal-induced laterally crystallized polysilicon thin-film transistors

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3 Author(s)
Man Wong ; Dept. of Electr. & Electron. Eng., Hong Kong Univ. of Sci. & Technol., Kowloon, Hong Kong ; Bhat, G.A. ; Kwok, Hoi S.

A reverse short-channel effect, manifested by an increase in the transistor threshold voltage as the channel length is reduced, is observed in conventional metal-induced laterally crystallized thin-film transistors. Such an effect has not been observed in regular solid phase crystallized thin-film transistors and can be eliminated by a brief hydrogen plasma treatment.

Published in:

Electron Device Letters, IEEE  (Volume:20 ,  Issue: 11 )