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Interaction of F/sub 2/ excimer laser light with various types of synthetic SiO/sub 2/ glasses: towards the 3rd generation of synthetic silica

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3 Author(s)
Hosono, H. ; Mater. & Struct. Lab., Tokyo Inst. of Technol., Japan ; Mizuguchi, M. ; Ogawa, T.

The authors consider the VUV-UV optical transmission spectra of synthetic silica specimens before and after F/sub 2/ laser irradiation. The absorption edge in the specimens differs from sample to sample: the absorption edge of the F-doped specimen is located at a shorter wavelength (153 nn) compared with the wet SiO/sub 2/ (155 nm) or the dry SiO/sub 2/ (157nm).

Published in:

Microprocesses and Nanotechnology Conference, 1999. Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International

Date of Conference:

6-8 July 1999