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Surface acoustic wave (SAW) resonators on ST cut quartz, with synchronous placement of the interdigital transducers (IDT), were designed, fabricated, and measured. The basic structure of the resonators was a two-port one. The one-port resonators were obtained by parallel connection of the two IDT or by short circuiting one of them. The IDT were apodized to eliminate coupling to spurious modes. The transfer function of the two-port resonators was calculated by using the scattering matrix method. Several models of these resonators were investigated in the frequency range from about 300 to 715 MHz. By matching the theoretical and experimental transfer functions, the loss coefficient as a function of frequency and the SAW velocity in the reflector area as a function of aluminium layer thickness were determined. The responses of the resonators were free of any spurious modes.
Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on (Volume:46 , Issue: 5 )
Date of Publication: Sept. 1999