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Self-alignment of optical fibres with optical quality end-polished silicon rib waveguides using wet chemical micromachining techniques

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5 Author(s)
Rosa, M.A. ; Sch. of Microelectron. Eng., Griffith Univ., Brisbane, Qld., Australia ; Ngo, N.Q. ; Sweatman, D. ; Dimitrijev, S.
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This paper presents a new cost-effective method for self-aligning optical fibres on silicon platforms and for achieving optical quality end-polished silicon-on-insulator (SOI) rib waveguide devices using micromachining techniques. By careful alignment to the ⟨110⟩ plane of the device layer of an SOI wafer, rib waveguide devices with self-alignment features are fabricated with the ends of each waveguide wet etched and subsequently polished providing an optical quality interface. Eliminating the need to saw cut and mechanically polish the ends of fabricated devices the overall fabrication process is simplified, whilst also providing an optic fibre self-alignment capability to the ends of fabricated waveguide devices with an alignment accuracy of ±0.5 μm

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Optoelectronic and Microelectronic Materials Devices, 1998. Proceedings. 1998 Conference on

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