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Quartz crystal microbalance humidity sensor with porous electrodes

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3 Author(s)
Galatsis, K. ; Sensor Technol. Lab., R. Melbourne Inst. of Technol., Vic., Australia ; Wenmin Qu ; Wlodarski, W.

This short paper describes a new idea for humidity measurement using QCM (Quartz Crystal Microbalance) devices. It is based on an etching approach which produces micropores into the electrodes of a QCM, instead of the common approach of coating the electrodes with hygroscopic materials. The electrodes are etched wet-chemically using buffered king water (NHO3:HCl=1:3). The electrode surface becomes rough, resulting in a large surface area for water adsorption. Photolithographic etching using a plasma will be the next research stage, this will eliminate the generation of a randomly dented surface, hence providing a uniform porous structure. Fabrication and results of preliminary measurement are described in this paper

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Optoelectronic and Microelectronic Materials Devices, 1998. Proceedings. 1998 Conference on

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