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Recent progress on gas sensors based on semiconducting thin films

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6 Author(s)

In this paper we review the electrical properties of semiconducting layers based on metal oxide thin films used for monitoring environmental gases and examine some innovative technique to increase the sensor selectivity towards particular gases (pulsed temperature, use of UV irradiation). The sensing layers are deposited onto a micromachined silicon substrate, which is characterized by low power consumption and allowed the interface with the process electronics

Published in:

Optoelectronic and Microelectronic Materials Devices, 1998. Proceedings. 1998 Conference on

Date of Conference:

1999

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