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Salicidation process for submicrometre gate MOSFET fabrication using a resistless electron beam lithography process

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4 Author(s)
Michel, S. ; Dept. de Genie Electr., Sherbrooke Univ., Que., Canada ; Lavallee, E. ; Beauvais, J. ; Mouine, J.

Recently, a novel silicide direct write electron beam lithography (SiDWEL) process has been developed in order to achieve high resolution (50 nm) silicide structures without the need for any supplementary annealing step. This new lithography technique is used to fabricate N-type MOSFET devices with platinum silicide gates. The fabrication uses a mix and match approach to combine the SiDWEL process with conventional MOSFET fabrication techniques

Published in:

Electronics Letters  (Volume:35 ,  Issue: 15 )

Date of Publication:

22 Jul 1999

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