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Increased-area oxidised single-fundamental mode VCSEL with self-aligned shallow etched surface relief

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7 Author(s)
Unold, H.J. ; Dept. of Optoelectron., Ulm Univ., Germany ; Grabherr, M. ; Eberhard, F. ; Mederer, F.
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A self-aligning fabrication process is presented for enhancing the fundamental singlemode emission of selectively oxidised vertical cavity surface emitting lasers using a surface relief etching technique. The mechanism underlying the increase in threshold gain due to the use of a shallow surface relief is described and the results obtained for a 7 μm device at 850 nm are presented

Published in:

Electronics Letters  (Volume:35 ,  Issue: 16 )