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A multilevel Newton method for mixed-energy domain simulation of MEMS

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2 Author(s)
N. R. Aluru ; Beckman Inst. for Adv. Sci. & Technol., Illinois Univ., Urbana, IL, USA ; J. White

An efficient black-box algorithm for self-consistent analysis of three-dimensional (3-D) microelectromechanical systems (MEMS) is described. The algorithm is matrix-free based and employs a multilevel Newton technique to solve the coupled electromechanical equations. The new approach is shown to converge very rapidly and is much faster than relaxation algorithm for tightly coupled cases. While this paper focuses on coupled electromechanical analysis, the proposed algorithm can be extended to include several coupled domains typically encountered in MEMS

Published in:

Journal of Microelectromechanical Systems  (Volume:8 ,  Issue: 3 )