By Topic

Development of miniaturized piezoelectric actuators for optical applications realized using LIGA technology

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Debeda, H. ; Lab. IXL, Bordeaux I Univ., Talence, France ; Freyhold, T.v. ; Mohr, Jurgen ; Wallrabe, U.
more authors

To combine the advantages of the LIGA technology and piezoelectric materials, first prototypes of movable elastic LIGA structures have been realized on piezoelectric substrates. The structures consist of a flexible beam fixed to the piezoelectric substrate at its two ends in order to amplify the d31-contraction of the piezoelectric substrate. By using this flexible LIGA beam as a magnification mechanism, the small displacements of the piezoelectric substrate are amplified by more than a factor of 20, offering various possibilities of applications, especially in micro-optics. In this paper, first the fabrication process and the performance of these new prototypes of LIGA piezoelectric actuators are described in detail, demonstrating the feasibility of the new concept combining the LIGA technique and piezoelectric substrates. Subsequently, LIGA-piezoelectric actuators developed for micro-optical applications are presented. These new optical actuators are also based on an elastic beam but slightly modified in order to modulate light propagating in optical fibers. They find promising applications as micro-optical attenuators or choppers whose performance is demonstrated

Published in:

Microelectromechanical Systems, Journal of  (Volume:8 ,  Issue: 3 )