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Impact of substrate resistivity on the high frequency performance of metal interconnect

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5 Author(s)

Substrate effects have a major impact on the high frequency performance of interconnects. This paper discusses the impact of the substrate resistivity on the frequency dependence of the intermetal capacitance and mutual inductance, and on the effective metal resistance. The relative importance of this frequency dependence is discussed. As an example, the significance of these effects for on-chip spiral inductors are also demonstrated

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Interconnect Technology, 1999. IEEE International Conference

Date of Conference: