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The computer simulation and calculation for the strain distribution of the twin-isles high temperature pressure sensor

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6 Author(s)
Yao Suying ; Sch. of Electron. Inf. & Eng., Tianjin Univ., China ; Zhang Wei ; Qu Hongwei ; Mao Ganru
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In this paper, the strain distribution of the twin-isles structure of polysilicon pressure sensor has been simulated and calculated by computer through finite element method. The 3-D patterns have been plotted. According to the law of strain distribution of twin-isles structure, the design of polysilicon strain resistance is optimized. Moreover, the disadvantage that piezoresistive coefficients of polysilicon are lower than single-crystal silicon is remedied. The twin-isles structure polysilicon piezoresistance pressure sensors are fabricated. They have high sensitivity and high working temperature. The results of experiments agree with calculation

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Solid-State and Integrated Circuit Technology, 1998. Proceedings. 1998 5th International Conference on

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