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Fabrication of submicron BSCCO stacked junctions by focused ion beam (FIB)

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3 Author(s)
Latyshev, Yu.I. ; Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan ; Kim, S.-J. ; Yamashita, T.

A method for the fabrication of in-plane submicron size intrinsic Josephson junctions by focused ion beam (FIB) has been developed. The method includes double-sided processing of thin layered single crystals by FIB and has been demonstrated on high quality BSCCO (2212) single crystal whiskers. The stacked junctions with in-plane area down to 0.3 /spl mu/m/sup 2/ have been fabricated without deterioration of superconducting transition temperature T/sub c/ and the superconducting energy gap /spl Delta/.

Published in:

Applied Superconductivity, IEEE Transactions on  (Volume:9 ,  Issue: 2 )

Date of Publication:

June 1999

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