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A new fabrication technique for ultra-small diffusion-cooled hot-electron bolometers

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3 Author(s)
Datesman, A.M. ; Dept. of Electr. Eng., Virginia Univ., Charlottesville, VA, USA ; Zhang, J.Z. ; Lichtenberger, A.W.

Hot-electron bolometers (HEBs) are becoming the technology of choice for heterodyne mixing in the short submillimeter wavelength regime (frequencies above 1 THz). In this paper, we describe a new, versatile, easily variable method of diffusion-cooled HEB fabrication using a focused-ion beam (FIB) microscope. This technique does not require electron-beam lithography or definition of the bolometer element by lift-off.

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Applied Superconductivity, IEEE Transactions on  (Volume:9 ,  Issue: 2 )