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Hot-electron bolometers (HEBs) are becoming the technology of choice for heterodyne mixing in the short submillimeter wavelength regime (frequencies above 1 THz). In this paper, we describe a new, versatile, easily variable method of diffusion-cooled HEB fabrication using a focused-ion beam (FIB) microscope. This technique does not require electron-beam lithography or definition of the bolometer element by lift-off.
Date of Publication: June 1999