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Fabrication of terahertz YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// hot-electron bolometer mixers

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5 Author(s)
A. W. Kleinsasser ; Jet Propulsion Lab., California Inst. of Technol., Pasadena, CA, USA ; J. B. Barner ; M. J. Burns ; B. S. Karasik
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Superconducting hot-electron bolometer (HEB) mixers are promising heterodyne detectors for THz frequencies. HEB mixers operating at 4 K or below offer the possibility of near-quantum-limited performance without an upper frequency limit imposed by the superconducting energy gap. High temperature superconductor HEB mixers offer very sensitive, low power heterodyne detectors operating at temperatures approaching 90 K for applications requiring closed-cycle refrigeration. We report on recent progress in fabricating and characterizing high-T/sub c/ mixers based on ultra-thin (10-20 nm) YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// films patterned to submicrometer dimensions (0.1-1 /spl mu/m) and incorporated into 1-3 THz planar mixer circuits.

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IEEE Transactions on Applied Superconductivity  (Volume:9 ,  Issue: 2 )