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4-band×4096-element Schottky-barrier infrared linear image sensor

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6 Author(s)
Denda, M. ; Mitsubishi Electr. Corp., Hyogo, Japan ; Kimata, M. ; Iwade, S. ; Yutani, N.
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A multispectral linear array has been developed for remote-sensing applications in the short-wavelength (SW) infrared (IR) band. The device is a monolithic quadruple-band image sensor, consisting of 4096 detectors for each band. The SW-IR sensor uses silicon Schottky-barrier (SB) infrared charge-coupled-device (IRCCD) technology. Platinum silicide SB detectors are used. They operate at cryogenic temperature and respond to the short- and middle-wavelength infrared regions. The package for the SW-IRCCD has also been developed. The package has a SiC-Al2O3-SiC structure. The performance of the device has been measured, and the device can be used in spaceborne applications

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Electron Devices, IEEE Transactions on  (Volume:38 ,  Issue: 5 )