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We have investigated the advancement of the trilayer junction fabrication process toward the YBaCuO/PrBaCuO/YBaCuO trilayer junctions with the YBaCuO wiring layers. Run-to-run variation of J/sub c/ was obtained to be factor three for the YBaCuO junctions with Au wiring layer on the two substrates. We found that c-axis oriented YBaCuO films with T/sub c/ of 85 K were developed on an  SrTiO/sub 3/ substrates with CeO/sub 2//MgO buffer layers. From these results, we have attempted to fabricate YBaCuO trilayer junctions with the YBaCuO wiring layer.