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Browse Journals & Magazines > Applied Superconductivity, IE ...> Volume:9 Issue:2 Help

Fabrication of superconducting delay line with GaAs Schottky diode

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2 Author(s)
Koh, K. ; Dept. of Electr. & Electron. Eng., Kanagawa Inst. of Technol., Japan ; Hohkawa, K.

We improved the fabrication process of superconductor/semiconductor devices based on epitaxial liftoff (ELO) technology by using polyimide film in place of Apiezon wax. We investigated the process conditions and fabricated basic GaAs devices. We also succeeded in bonding a GaAs Metal-Semiconductor-Metal photodiode on YBCO micro-strip-line that is formed on an SrTiO/sub 3/ substrate. The basic characteristics of this photodiode are measured and the results have confirmed that the ELO process using polyimide film is feasible for fabricating superconductor/semiconductor functional devices.

Published in:
Applied Superconductivity, IEEE Transactions on  (Volume:9 ,  Issue: 2 )

Date of Publication: June 1999

Page(s):
3224 - 3227
ISSN :
1051-8223
INSPEC Accession Number:
6356776
Digital Object Identifier :
10.1109/77.783715
Product Type:
Journals & Magazines
Date of Current Version :
06 August 2002
Issue Date :
June 1999
Sponsored by :
The IEEE Council on Superconductivity

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