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Asymmetrical FIB junctions as components for HTS SFQ circuits

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5 Author(s)
Y. Mizuno ; Supercond. Res. Lab., ISTEC, Tokyo, Japan ; K. Miyahara ; J. G. Wen ; T. Utagawa
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High-temperature superconductor (HTS) Josephson junctions have been formed on asymmetrical V-shape grooves etched by a Ga focused-ion beam (FIB). The asymmetrical groove is made by tilting the substrate during FIB etching. Transmission electron microscopy (TEM) shows a tilted V-shape groove and two clear grain boundaries in the NBCO film. The I-V characteristics of the junctions are controlled by the dose amount of Ga ions and the NdBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// (NBCO) film thickness. The inductance of the lines was estimated to be 0.5 pH//spl mu/m for the film thickness of 200 nm for the characteristics of a SQUID fabricated with the asymmetrical FIB junctions.

Published in:

IEEE Transactions on Applied Superconductivity  (Volume:9 ,  Issue: 2 )