Referenced Items are not available for this document.
Silicon crystalline defects in production silicon wafers affect the yield. In this paper, the 155 Wright etch was used to identify the root causes of silicon crystalline defects. A few low yield cases are studied and the different types of crystalline defects and their possible root causes and preventative measures taken are discussed
Published in:
Semiconductor Electronics, 1998. Proceedings. ICSE '98. 1998 IEEE International Conference on
Date of Conference: 1998
- Page(s):
- 1 - 8
- Meeting Date :
- 24 Nov 1998-26 Nov 1998
- Print ISBN:
- 0-7803-4971-7
- INSPEC Accession Number:
- 6430634
- Conference Location :
- Bangi
- Digital Object Identifier :
- 10.1109/SMELEC.1998.781139
- Product Type:
- Conference Publications
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