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Studies on stacking faults and crystalline defects in fabrication silicon wafer substrate

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5 Author(s)
Hua, Y.N. ; Chartered Semicond. Manuf. Ltd., Singapore ; Lim, S.L. ; An, L.H. ; Guo, Z.R.
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Silicon crystalline defects in production silicon wafers affect the yield. In this paper, the 155 Wright etch was used to identify the root causes of silicon crystalline defects. A few low yield cases are studied and the different types of crystalline defects and their possible root causes and preventative measures taken are discussed

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Semiconductor Electronics, 1998. Proceedings. ICSE '98. 1998 IEEE International Conference on

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