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Organic patch sensor for electro-optic measurement of electrical signals in integrated circuits

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5 Author(s)
Nagatsuma, T. ; NTT LSI Lab., Kanagawa, Japan ; Yaita, M. ; Shinagawa, M. ; Amano, M.
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A highly sensitive, versatile and low-cost electric field sensor has been developed for measuring internal electrical signals in integrated circuits using an electro-optic sampling technique. This sensor uses an organic nonlinear optical (NLO) polymer coated on thin polyamide films and is directly bonded to the circuit under test without a mirror coating. Electro-optic sampling was conducted using the sensor, and a voltage sensitivity of less than a few tens of millivolts was obtained.

Published in:

Electronics Letters  (Volume:27 ,  Issue: 11 )