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Analysis of hot-electron reliability and device performance in 80-nm double-gate SOI n-MOSFET's

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4 Author(s)
Williams, S.C. ; Dept. of Electr. & Comput. Eng., North Carolina State Univ., Raleigh, NC, USA ; Kim, K.W. ; Littlejohn, M.A. ; Holton, W.C.

In this paper, we employ a comprehensive Monte Carlo-based simulation method to model hot-electron injection, to predict induced device degradation, and to simulate and compare the performance of two double-gate fully depleted silicon-on-insulator n-MOSFET's (one with a lightly-doped channel and one with a heavily-doped channel) and a similar lightly-doped single-gate design. All three designs have an effective channel length of 80 nm and a silicon layer thickness of 25 mm. Monte Carlo simulations predict a spatial retardation between the locations of peak hot-electron injection into the front and back oxides. Since the observed shift is a significant portion of the channel length, the retardation effect greatly influences induced degradation in otherwise well-designed SOI devices. This effect may signal an important consideration for sub-100-nm design strategy. Simulations were also conducted to compare transistor performance against a key figure of merit. Evaluation of reliability and performance results indicate that the double-gate design with a lightly doped channel offers the best tradeoff in immunity to hot-electron-induced degradation and performance

Published in:

Electron Devices, IEEE Transactions on  (Volume:46 ,  Issue: 8 )

Date of Publication:

Aug 1999

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