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A rod-shaped vibro touch sensor using PZT thin film

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4 Author(s)
Kanda, T. ; Dept. of Precision Machinery Eng., Tokyo Univ., Japan ; Morita, T. ; Kurosawa, M.K. ; Higuchi, T.

We have fabricated a probe sensor. This sensor is for high precision coordinate measuring machines, surface roughness measuring tools, or scanning probe microscopes (SPM). This sensor consists of a rod vibrating in the axial direction. The longitudinal vibration was excited and also detected by PZT thin film. The PZT thin film was fabricated by a hydrothermal method. The hydrothermal method uses the reaction process in hot and high pressure aqueous solutions. We made a 27.8-mm long sensor. Its resonance frequency was 116 kHz. The sensitivity and resolution were evaluated by experiments. We succeeded in oscillating the rod and detecting the contact.

Published in:

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on  (Volume:46 ,  Issue: 4 )

Date of Publication:

July 1999

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