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Electromigration in Al thin films induced by surface acoustic waves: application to imaging

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6 Author(s)

The propagation of a high amplitude surface acoustic wave in an Al thin film induces a large-scale electromigration phenomenon resulting in a permanent etching of the acoustic field in the film. The etched patterns depend on the time of propagation and on the acoustic characteristics. Preliminary observations of a few grooved structures in Al films have been performed by different techniques. A first explanation of this phenomenon based on dynamical Grinfeld instabilities is proposed. By providing permanent pictures of acoustic fields emitted by transducers, this effect could be used to perform imaging of surface acoustic wave propagation.

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Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on  (Volume:46 ,  Issue: 4 )