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Enhancement and stabilization of cathodic arc using mesh anode

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6 Author(s)
Tao Zhang ; Dept. of Phys. & Mater. Sci., City Univ. of Hong Kong, Kowloon, Hong Kong ; Tang, Baoyin ; Zeng, Zhaoming ; Chen, Qingchuan
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The performance and characteristics of a cathodic arc deposition apparatus consisting of a titanium cathode, an anode with and without a tungsten mesh, and a coil producing a focusing magnetic field between the anode and cathode arc investigated. The arc voltage Va is measured with a fixed arc current for an anode diameter of 40 mm. The relationship between Va and the magnetic field B with and without a mesh is obtained. In addition, the relationship between the arc current Ia and Vc, the voltage to which the artificial transmission line was charged, is measured with and without the mesh to determine the minimum ignition voltage for the arc when the anode hole diameter is 40 mm. The arc resistance increases with the focusing magnetic strength B and decreases when using the mesh. Our results indicate that the high transparency and large area of the mesh allows a high plasma flux to penetrate the anode from the cathodic arc. The mesh also stabilizes the cathodic arc and gives better performance when used in concert with a focusing magnetic field

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Plasma Science, IEEE Transactions on  (Volume:27 ,  Issue: 3 )