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RF discharge impedance measurements using a new method to determine the stray impedances

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3 Author(s)
Bakker, L.P. ; Eindhoven Univ. of Technol., Netherlands ; Kroesen, G.M.W. ; de Hoog, F.J.

The impedance of a capacitively coupled radio frequency discharge in a tubular fluorescent lamp filled with neon and mercury is measured. The stray impedances in the electrical network are determined using a new method that requires no extra instruments. The reflection of power is used to determine the stray impedances. Making use of a simple discharge impedance model, the electron density in the lamp is estimated

Published in:

Plasma Science, IEEE Transactions on  (Volume:27 ,  Issue: 3 )