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Fabrication and characterization of integrated optical waveguides in sulfide chalcogenide glasses

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8 Author(s)
J. -F. Viens ; Center for Opt., Laval Univ., Que., Canada ; C. Meneghini ; A. Villeneuve ; T. V. Galstian
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This paper reports on the fabrication process of As-S-(Se)-based chalcogenide glass optical waveguides using three techniques: photolithography, laser beam writing, and ion implantation. The fabrication method of the bulk sulfide glasses and the processing of integrated devices are described and assessed in light of the propagation characteristics and optical losses in each case

Published in:

Journal of Lightwave Technology  (Volume:17 ,  Issue: 7 )