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Ultra shallow n/sup+//p junctions formed by out-diffusion from TiSi2 with an amorphous silicon buffer layer

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4 Author(s)
Huang, Cheng Tung ; National Chiao Tung University ; Wen Luh Yang ; Tsong Min Shieh ; Tan Fu Lei

First Page of the Article

Published in:

Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International

Date of Conference:

1994