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A novel thermally-actuated silicon micropump

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4 Author(s)
Zou, J. ; Dept. of Precision Instrum. & Mechanology, Tsinghua Univ., Beijing, China ; Ye, X.Y. ; Zhou, Z.Y. ; Yang, Y.

The thermal dynamics of a bimetallic microactuator in micropump are analyzed by using FEM. On the basis of the analysis, a novel thermally-actuated silicon micropump is developed. This micropump utilizes both bimetallic thermal actuation and thermal pneumatic actuation. The bimetallic microactuator is composed of an aluminum membrane and a silicon membrane. An air chamber is also designed to realize the thermal pneumatic actuation. A new micro check valve is developed through surface micromachining. This microvalve has a high reverse-to-forward flow resistance and a very small reverse leakage

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Micromechatronics and Human Science, 1997. Proceedings of the 1997 International Symposium on

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