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New PZT actuator using piezoelectric thin film on parallel plate structure

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6 Author(s)
Sato, H. ; Dept. of Micro. Syst. Eng., Nagoya Univ., Japan ; Arai, F. ; Ishihara, H. ; Fukuda, T.
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The parallel beam structure and the hydrothermal method have many significant features. Combining these features, we made a PZT microactuator by the hydrothermal method on the parallel beam structure. The basic properties of the prototype are investigated. We propose applications of this actuator: the multi degrees of freedom actuator, G-sensor, and vibration gyroscope. Finally, we measured the relationship between output-voltage and rotation

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Micromechatronics and Human Science, 1997. Proceedings of the 1997 International Symposium on

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