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Eddy current modelling using the impedance method for surface impedance profiling

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3 Author(s)
D. A. James ; Sch. of Microelectron. Eng., Griffith Univ., Brisbane, Qld., Australia ; S. G. O'Keefe ; D. V. Thiel

In this paper a new technique for determining surface impedance is developed. The technique is derived from an eddy current modelling technique, the impedance method. Considerable extension and development of the impedance method has been undertaken, enabling the prediction of surface impedance measurements for horizontally stratified media and in the vicinity of vertical dislocations. The method is compared with surface impedance theory for horizontally stratified media and with field based results near laterally discontinuous structures

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IEEE Transactions on Magnetics  (Volume:35 ,  Issue: 3 )