Referenced Items are not available for this document.
Silicon micromachined ultrasonic devices have been fabricated using a CMOS-compatible process. Devices of up to 1 mm in size have been tested, with silicon nitride membranes of 1 μm and 2 μm thickness. The work has investigated the response of these ultrasonic receivers, as a function of membrane thickness and lateral dimensions. It is shown that the resultant surface micromachined transducers can operate over a wide bandwidth in air, without the resonant behaviour associated with previous devices
Published in:
Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE
(Volume:2
)
Date of Conference: 1998
- Page(s):
- 1081 - 1084 vol.2
- Meeting Date :
- 05 Oct 1998-08 Oct 1998
- ISSN :
- 1051-0117
- Print ISBN:
- 0-7803-4095-7
- INSPEC Accession Number:
- 6415563
- Conference Location :
- Sendai
- Digital Object Identifier :
- 10.1109/ULTSYM.1998.765017
- Product Type:
- Conference Publications
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