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Evaluation of the plasma distribution of a quasi-linear constricted plasma source

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3 Author(s)
Anders, Andre ; Lawrence Berkeley Nat. Lab., California Univ., Berkeley, CA, USA ; MacGill, Robert A. ; Rubin, M.

The quasi-linear constricted plasma source is a downstream plasma source with ten linearly aligned discharge cells. Each cell operates on the basis of a constricted glow discharge. The plasma output can easily be monitored by the plasma-emitted light. The information is not only intuitive but can also he used to operate on-line feedback control of the plasma source which is important for large-area plasma processing of materials

Published in:

Plasma Science, IEEE Transactions on  (Volume:27 ,  Issue: 1 )

Date of Publication:

Feb 1999

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