Evaluation of the plasma distribution of a quasi-linear constricted plasma source

The quasi-linear constricted plasma source is a downstream plasma source with ten linearly aligned discharge cells. Each cell operates on the basis of a constricted glow discharge. The plasma output can easily be monitored by the plasma-emitted light. The information is not only intuitive but can also he used to operate on-line feedback control of the plasma source which is important for large-area plasma processing of materials.