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Plasma sheath electric field strengths above a grooved electrode in a parallel-plate radio-frequency discharge

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5 Author(s)
Czarnetzki, U. ; Inst. fur Laser- und Plasmaphys., Essen Univ., Germany ; Hebner, G.A. ; Luggenholscher, D. ; Dobele, H.F.
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The magnitude of the sheath electric field above a grooved electrode was measured using a novel, two color, laser induced fluorescence technique. Spatially resolved electric fields in the sheath region were determined by mapping the field induced Stark splitting of the n=14 level in atomic hydrogen. Measured electric field values are in good agreement with calculated values

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Plasma Science, IEEE Transactions on  (Volume:27 ,  Issue: 1 )