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Plasmoid formation and multiple steady states in a low pressure, inductively coupled electronegative plasma

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3 Author(s)
Economou, D.J. ; Dept. of Chem. Eng., Houston Univ., TX, USA ; Wise, Richard S. ; Kubota, A.A.

Hysteresis and multiple steady states have been observed in a low pressure inductively coupled plasma in chlorine gas. A bowl-shaped bright structure with sharply delineated edges (plasmoid) was found to form under the planar coil. A different plasma state with rather diffuse emission of lower intensity was also observed under the same operating conditions

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Plasma Science, IEEE Transactions on  (Volume:27 ,  Issue: 1 )