Referenced Items are not available for this document.
We report of the design of a SAW delay line developed for a wireless pressure sensing system operating in the 434 MHz ISM-band. The structure is a one port configuration fabricated on quartz 37.5°rotYX. It is hermetically sealed in all-quartz-package (APQ) technology with the SAW structure being placed on a diaphragm inside the cavity. The sensor allows for the measurement of absolute pressure values in the range from 0 to 8.5 bar. The SAW structure shows a linear phase although it incorporates chirped SAW components for enhancing the sensor sensitivity. The SAW structure is built up of two overlap-weighted dispersive split finger interdigital transducers (IDTs). An improvement of the sensor sensitivity by a factor of 32 compared to systems using non-dispersive SAW components has been achieved
Published in:
Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE
(Volume:1
)
Date of Conference: 1998
- Page(s):
- 355 - 358 vol.1
- Meeting Date :
- 05 Oct 1998-08 Oct 1998
- ISSN :
- 1051-0117
- Print ISBN:
- 0-7803-4095-7
- INSPEC Accession Number:
- 6396396
- Conference Location :
- Sendai
- Digital Object Identifier :
- 10.1109/ULTSYM.1998.762164
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