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Hydrogen dilution effect on the properties of coplanar amorphous silicon thin-film transistors fabricated by inductively-coupled plasma CVD

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4 Author(s)
Kim, Sung Ki ; Dept. of Phys., Kyung Hee Univ., Seoul, South Korea ; Young Jin Choi ; Cho, Kyu Sik ; Jin Jang

The electrical and optical properties of the hydrogenated amorphous silicon (a-Si:H) films deposited by inductively-coupled plasma (ICP) chemical vapor deposition (CVD) with a variation of H2 flow rate have been studied. The photosensitivity of a-Si:H is ~107 when the H2/SiH4 ratio is between 3 and 8. With increasing H2/SiH4, the SiH2 mode infrared absorption has a minimum at a H2/SiH4 ratio of 8. Coplanar a-Si:H thin-film transistors (TFT's) were fabricated using a triple layer of thin a-Si:H, silicon-nitride, and a-Si:H deposited by ICP-CVD using ion doping and low resistivity Ni silicide. After patterning the thin a-Si:H/silicon-nitride layers on the channel region, the gate and source/drain regions were ion-doped and then heated at 230°C to form Ni silicide layers. The low resistive Ni silicide formed on the a-Si:H reduces the offset length between gate and source/drain, leads to a coplanar a-Si:H TFT. The TFT exhibited a field effect mobility of 0.6 cm2/Vs and a threshold voltage of 2.3 V at the H2/SiH4 ratio of 8. The effect of H2 dilution in SiH4 on the coplanar a-Si:H TFT performance has been investigated. We found that the performance of the TFT is the best when the SiH2 mode density in a-Si:H is the minimum. The coplanar TFT is very suitable for large-area, high density TFT displays because of its low parasitic capacitance between gate and source/drain contacts

Published in:

Electron Devices, IEEE Transactions on  (Volume:46 ,  Issue: 5 )

Date of Publication:

May 1999

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