Analytical modeling of the threshold voltage of a Si1-xGex/Si heterojunction pMOSFET has been performed using a quasi-two-dimensional (quasi-2-D) approach for the calculation of the potential. It is shown that the use of Si1-x Gex in the source region leads to an improvement in the short-channel behavior of deep submicron pMOSFETs. The VT roll-off can be substantially decreased by introducing a material dependent barrier between source and channel. Furthermore it will be proven that this advantage will become stronger when channel lengths are decreased toward the deep submicron regime
Published in:
Electron Devices, IEEE Transactions on
(Volume:46
,
Issue:
5
)
Date of Publication: May 1999