Optical scanners realized by surface-micromachined vertical torsion mirror

We report on a novel vertical torsion mirror fabricated by surface-micromachining for optical scanner applications. Driven by an electrostatic actuator, the scanning mirror has a resonant frequency of 0.5 kHz and an optical scan range of 26/spl deg/. The maximum achievable number of resolvable spots for this 300 μm×250 μm scanner is 238.