By Topic

Optical scanners realized by surface-micromachined vertical torsion mirror

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Su, G.-D.J. ; Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA ; Shi-Sheng Lee ; Wu, M.C.

We report on a novel vertical torsion mirror fabricated by surface-micromachining for optical scanner applications. Driven by an electrostatic actuator, the scanning mirror has a resonant frequency of 0.5 kHz and an optical scan range of 26/spl deg/. The maximum achievable number of resolvable spots for this 300 μm×250 μm scanner is 238.

Published in:

Photonics Technology Letters, IEEE  (Volume:11 ,  Issue: 5 )