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Optical scanners realized by surface-micromachined vertical torsion mirror

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3 Author(s)
Su, G.-D.J. ; Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA ; Lee, C.D. ; Wu, M.C.

We report on a novel vertical torsion mirror fabricated by surface-micromachining for optical scanner applications. Driven by an electrostatic actuator, the scanning mirror has a resonant frequency of 0.5 kHz and an optical scan range of 26/spl deg/. The maximum achievable number of resolvable spots for this 300 /spl mu/m/spl times/250 /spl mu/m scanner is 238.

Published in:

Photonics Technology Letters, IEEE  (Volume:11 ,  Issue: 5 )

Date of Publication:

May 1999

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