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Low-loss 1/spl times/2 multimode interference wavelength demultiplexer in silicon-germanium alloy

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6 Author(s)
Li, Baojun ; Surface Phys. Lab., Fudan Univ., Shanghai, China ; Li, Guozheng ; Liu, Enke ; Jiang, Zuimin
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A low-loss multimode interference wavelength demultiplexer for 1.3- and 1.55-/spl mu/m operations based on the silicon-germanium alloy material has been proposed and demonstrated. The device was fabricated by molecular beam epitaxy followed by lithography and plasma etching. The input/output facets were polished mechanically. The measured insertion losses are 4.29 and 4.28 dB and the extinction ratios are 25 and 22 dB at 1.3 and 1.55 /spl mu/m, respectively.

Published in:

Photonics Technology Letters, IEEE  (Volume:11 ,  Issue: 5 )

Date of Publication:

May 1999

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