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Monolithic integration of vertical-cavity surface-emitting laser and diffractive optical element for advanced beam shaping

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4 Author(s)
Martinsson, H. ; Dept. of Microelectron., Chalmers Univ. of Technol., Goteborg, Sweden ; Bengtsson, J. ; Ghisoni, M. ; Larsson, A.

We have demonstrated a vertical-cavity surface-emitting laser (VCSEL) with a monolithically integrated diffractive optical element (DOE) for advanced beam shaping. The DOE is a two-level surface relief, etched into the GaAs substrate beneath a bottom-emitting VCSEL. The combination generates a 4×4 array of focused spots 10 mm from the substrate with spot sizes down to less than 400 μm, almost at the diffraction limit. Diffraction efficiencies of 29% and uniformity errors of 14% were measured.

Published in:

Photonics Technology Letters, IEEE  (Volume:11 ,  Issue: 5 )